The RTP annealing furnace tube can move freely, and the sealing flanges are connected by hasp, which is convenient and quick to put and take materials, avoid the possibility of air leakage caused by the manual operation of the bolt sealing; reduce the heating caused by the installation of the flange The possibility of tube damage; when the furnace tube is moved out of the furnace, the cooling fan starts, which can achieve rapid cooling of the sample and meet the experimental requirements of material quenching and heating
