Slideable RTP Tube Furnace with Rapidly Heating and Cooling-cyky

slideable RTP tube furnace with Infrared Light Heating and Slide Cooling. It is capable of achieving a max. heating rate > 50°C/s  and a cooling rate  > 10°C/s. slideable RTP tube furnace is designed for growing graphene and carbon nanotubes by CVD.

slideable RTP tube furnace

slideable RTP tube furnace technical parameter:

Furnace Structure Double layer steel casing with air cooling keeps furnace surface temperature lower than 60°C.

One set of sliding rails is installed which allows furnace move from one side to the other side automatically at variable speeds using the control knob.

Vacuum flanges and the digital vacuum gauge are installed  for immediate use.

Power 9KW
Voltage AC 208-240V Single Phase, 50/60 Hz
Max. Temperature 1000°C (<1 hour)

800°C (<2 hours)

600°C (continuous)

Note: RTP furnaces should not be heated for long durations due to thin refractories.

Temperature Accuracy +/ – 2°C
Max. Heating Rate 50  ºC/s
Process Tube Size High purity fused quartz tube
Ø4″ OD x 1400mm L
Sliding Rails / Table Dual sliding rails made of Cr plated steel

Sliding rail length: 1200 mm

Driven by DC motor

Sliding Control Automatic sliding is controlled by the temperature controller.  When the heating program is finished, the furnace will slide from right to left at the set speed. Air fans will blow heated area to achieve fast cooling.

Sliding Range: 340mm

Sliding Speed: 0-70 mm/s; adjustable

Heating Elements 8 pcs Paralleled Infrared Heating  ( 1200w each)
Thermocouple K type, 1/4″ Dia x 24″ length
Vacuum Flanges Stainless steel vacuum flanges are installed on both ends of the tube.

Right flange:

Hinge-type flange for easy sample loading

1/4″diameter  feedthrough for inserting  K-type thermal couple

Needle valve with barb gas fitting is built in

Left flange:

Digital vacuum gauge is included

KF25 right angle valve is installed for connecting to a vacuum pump

Needle valve for vacuum release is included

Vacuum Level  Limited by vacuum pump

10^-2 torr can be achieved by mechanical pump

10^-4 torr can be reached by molecular pump

Flow Meter One flow-meter is built in with range: 16-160 ml/min
Dimensions 460 x 330 x 520  mm ( furnace only)

1800 x 450 x 680 mm ( furnace + sliding)

(click to enlarge the picture)

Net Weight 74″ x 39″ x 45″
Shipping Weight 300 lbs