CVD rotary tube furnace with 4 heating zones | CYKY

The CY-R1200X-100IC is a 4″ rotary CVD rotary tube furnace with 4”*440 heating zones. The furnace is especially good for preparing Li-Ion battery cathode and Anode materials with conductive coating, such as LiFePO3, LiMnNiO3, Si/C etc. This CVD rotary tube furnace has larger tube diameter (4″OD) combined with adjustable rotating angle, adjustable speed function.


Rotary Tube Furnace Specifications:

Furnace Construction 1. Double shell casing with three cooling fans2. High purity Alumina fibrous insulation for max. energy efficiency3. DC Gear motor drives quartz tube with variable speed 0 – 10 RPM4. The furnace can be electrically tilted up to 30° .5. Split cover enable faster cooling and easy operation.
Heating Zone length Single Zone: 440mm, in totalConstant temperature zone: 250 mm within +/-1℃
Processing tube Fused quartz tubeDimension: 100 mm O.D. x 90 mm I.D. x 1000 mm L


quartz tube

Sealing Flange one pair of 60mm SS sealing flange with needle valves and rotable gas connector is included for immediate use
Gas Fittings Inlet Fitting: Elbow Push-in connector for 6mm O.D tube; Outlet Fitting:  Elbow Push-in connector for 12mm O.D tube,or as customized
Max. Working Temperature 1100°C for continuously1200°C Max for < 1 hours
Temperature Controllers PID digital temperature controllers with 30 programmable segments
Temperature Uniformity +/- 1°C in heating Zone
Thermocouple Omega K type 3mm OD x 6″ L with high temperature tolerance (220°C) connector
Tube rotating Speed 0 – 10 RPM variable
Furnace tilt angle 0 – 30°
Chamber pressure 10-2 torr
 Power 2.5KW
 Voltage 208 – 240V single phase (30 A Breaker required)
 Warranty & Certificate One year limited warranty (consumable parts such as processing tubes, o-rings and heating elements are not covered by the warranty, replacements are available at related products below.)
 Net Weight 85 kg

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