two zone rtp tube furnace with cvd mos2 thin film preparation sliding | cyky

Two zone Rtp tube furnace is a process used in the manufacture of semiconductor devices that includes heating a plurality of semiconductor wafers to affect their electrical properties. Heat treatment is designed for different effects. The wafer can be heated to activate the dopant, convert the film into a thin film or convert the film into a wafer substrate interface, make a densely deposited film, change the state of the grown film, repair the implanted damage, move the dopant or dope The agent is transferred from one film to another or from the film into the wafer substrate.

RTP Tube Furnace
Two zone Rtp tube furnace can be integrated into other furnace processing steps, such as oxidation, or it can be disposed of by itself. The annealing furnace is completed by equipment designed to heat semiconductor wafers. The annealing furnace is an energy-saving periodic working furnace with ultra-energy-saving structure and fiber structure, saving 60% of electricity.

Two zone Rtp tube furnace Application

1.Rapid Thermal Annealing,ion implantation annealing

2.Graphene CVD preparation, nanotube growthing

3.Rapid thermal oxidation,Rapid thermal Nitriding

4.Silicidation,diffusion,contact alloying,crystallization and densification

Model No. CY-O1200-50IIC-RTP
Display Two separately LED digital gauge
Limiting temperature 1150℃
Working temperature ≤1100℃
Heating rate 0-20℃/min
Heating Zone length two heating zone

constant temperature zone:200mm

Quartz tube diameter OD50*1200mm
Temperature accuracy ± 1℃
Heating element Alchrome
Thermal couple K TYPE
Cooling method Double layer structure with fan cooling
Temperature control 30 steps programmable PID control
Chamber material Alumina fiber
Over-temperature alarm Yes
Over-current alarm Yes
Sealing flange S.S vacuum flange
Cooling method air forced cooling
Gas mixer One way with Float Flow Controller
Main Power 4.5Kw
Working voltage AC220V,50Hz

from China Suppliers, you can buy quality RTP furnace from Zhengzhou CY Scientific Instrument Co., Ltd